Abstract Grating tiling is an important fabrication technology for large-size gratings. However, when using grating tiling technology to form large-size echelle gratings, the interferometer cannot detect the grating's zero-order diffraction wavefront because the zero-order diffraction light of the echelle grating is weak. This prevents use of the zero-order and non-zero-order diffraction light of the grating to realize separation detection and correction of mosaic errors. To solve this problem, a new method for separation detection and correction of mosaic errors in mosaic gratings based on two detection lights with the same diffraction order but different incident angles is proposed and a mosaic error detection system is designed. Then, the correction steps for mosaic errors are summarized and the error in mosaic error detection system is analyzed. Finally, the measurement uncertainty in detecting the wavefront of the mosaic grating and the mosaic accuracy of the grating wavefront are analyzed. The uncertainty is 0.008λ (λ=632.8 nm) and the mosaic accuracy of the peak-to-valley wavefront is 0.069λ, which shows that high-precision measurements of the wavefront and high-precision mosaic of the wavefront were successfully achieved. The proposed method can be used for the mosaic of all blazed gratings.

中文翻译：

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基于相同衍射级不同入射角的两束检测光的马赛克光栅马赛克误差的分离检测与校正

摘要 光栅拼接是大尺寸光栅的重要制造技术。但是，在采用光栅拼接技术形成大尺寸阶梯光栅时，由于阶梯光栅的零级衍射光较弱，干涉仪无法检测到光栅的零级衍射波前。这就避免了利用光栅的零级和非零级衍射光来实现分离检测和镶嵌误差校正。针对这一问题，提出了一种基于衍射级数相同但入射角不同的两束检测光对马赛克光栅中的马赛克误差进行分离检测和校正的新方法，并设计了马赛克误差检测系统。然后，总结了镶嵌误差的纠正步骤，分析了镶嵌误差检测系统中的误差。最后，分析了检测镶嵌光栅波前的测量不确定度和光栅波前的镶嵌精度。不确定度为0.008λ（λ=632.8 nm），峰谷波前镶嵌精度为0.069λ，表明成功实现了波前的高精度测量和波前的高精度镶嵌。所提出的方法可用于所有闪耀光栅的镶嵌。这表明成功地实现了波前的高精度测量和波前的高精度镶嵌。所提出的方法可用于所有闪耀光栅的镶嵌。这表明成功地实现了波前的高精度测量和波前的高精度镶嵌。所提出的方法可用于所有闪耀光栅的镶嵌。