Aluminum hydride (AlH₃), an attractive hydrogen storage material, plays an important role in rocket and aerospace industry. The impurities in aluminum hydride may seriously cause the deterioration in its properties and stability. Mixing AlH₃ sample with the known content of silicon, we distinguish the elements in AlH₃ and determine their concentration by using PIXE, XPS and elemental analyzer. Al, Si, Cl, Ca and Fe were identified by PIXE. XPS technique was used to measure the oxidized product of the mixed silicon. C, H content were obtain from the elemental analyzer. The results of the impurity concentration show the effectiveness of the synergy among these techniques except carbon. The XPS result from the pristine sample shows the concentration of carbon is 6 times larger than the major element Al while the result from the elemental analyzer is only 0.620 wt%. It suggests that the XPS technique is surface-sensitive and not well suited to the determination of the bulk concentration of carbon. The mass fraction ratio of Al to H is ${\mu }_{\mathit{Al}/H}=8.718<\frac{27}{3}$, which indicates that the product partly decomposes.

氢化铝（AlH ₃）是一种有吸引力的储氢材料，在火箭和航空航天工业中起着重要的作用。氢化铝中的杂质可能会严重导致其性能和稳定性下降。将已知的硅含量的AlH ₃样品混合，我们区分AlH _3中的元素并使用PIXE，XPS和元素分析仪确定其浓度。通过PIXE鉴定出Al，Si，Cl，Ca和Fe。XPS技术用于测量混合硅的氧化产物。C，H含量从元素分析仪获得。杂质浓度的结果显示了除碳以外这些技术之间协同作用的有效性。原始样品的XPS结果表明，碳的浓度是主要元素Al的6倍，而元素分析仪的结果仅为0.620 wt％。这表明XPS技术对表面敏感，不适用于测定碳的总浓度。Al与H的质量比为${\mu }_{\mathit{铝}/H}=8.718<\frac{27}{3}$，表示产品部分分解。