Abstract

Factors causing parasitic distortions of interferograms in control systems based on reference single-component high-aperture computer-generated holograms (CGHs), which are made on flat substrates and have a binary phase structure, are analyzed with respect to the problem of interferometric testing of spherical and aspherical surfaces with high angular apertures. The quality of such CGHs is improved using the methods, means, and writing materials (titanium and chromium films) suitable for direct laser writing of their diffraction structure, which provides the generation of interferograms with minimal parasitic distortions. In particular, it is proposed to modulate the local transmission coefficient of the CGH structure by applying duty cycle modulation to the diffraction zones in order to reduce the variations in contrast of the generated interferogram. Possibilities of the application of the thermochemical laser technology of writing on titanium and chromium films for manufacturing high-aperture holograms with the f-number \(f/1\) and higher are discussed.

中文翻译：

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制造用于干涉法中参考波前成形的高孔径计算机生成全息图的新方法

摘要

针对在平板基板上制作的，具有二元相结构的参考单组分高孔径计算机生成全息图（CGH），在控制系统中引起干涉图寄生变形的因素，针对干涉测量的问题进行了分析。具有高角度孔径的球形和非球形表面。使用适合直接激光写入其衍射结构的方法，手段和书写材料（钛和铬膜）可提高此类CGH的质量，从而产生具有最小寄生失真的干涉图。特别是，为了减少所产生的干涉图的对比度的变化，提出了通过对衍射区域应用占空比调制来调制CGH结构的局部透射系数。应用热化学激光技术在钛和铬膜上书写以制造具有f值的高孔径全息图的可能性\（f / 1 \）及更高。