Abstract This paper presents the results of experimental studies and digital methods for recording of holograms using spatial light modulators. The use of holographic interference methods for measuring nanoscale irregularities is described for the case of a nanostep (70 nm in height and 30 $$\mu$$ m in width). Examples are given of the method of increased sensitivity for nanostep measurements and the method of hooks using a digital technique. Correction of internal system distortions in the interferometer has been shown to be a workable method. The holographic interference methods with digital processing of holograms allows the sensitivity of interferograms to be increased without loss of basic information about the object and without increasing the measurement accuracy.

中文翻译：

---

通过数字全息提高干涉图灵敏度

摘要 本文介绍了使用空间光调制器记录全息图的实验研究和数字方法的结果。描述了使用全息干涉方法测量纳米级不规则性的情况，用于纳米台阶（高度为 70 nm，宽度为 30 $\mu$$ m）。举例说明了提高纳米级测量灵敏度的方法和使用数字技术的钩子方法。干涉仪内部系统失真的校正已被证明是一种可行的方法。对全息图进行数字处理的全息干涉方法可以提高干涉图的灵敏度，而不会丢失关于物体的基本信息，也不会提高测量精度。