Flexible and tunable devices have, for decades, been the subject of many research areas, including, integrated systems, flexible electronics and photonics, which are calling for advanced properties of materials. Metasurfaces with designable optical properties have now been intensively studied for flexible photonic devices. Enabled by microelectromechanical systems (MEMS) and microfluidic technologies, reconfigurable metasurfaces base on mechanical actuations offer new approaches for flexible and tunable devices. In this view, we introduce metasurfaces based on MEMS actuations, droplets arrays, flexible substrates and microfluidic systems together with their applications on flexible and tunable devices.

数十年来，柔性和可调设备一直是许多研究领域的主题，包括集成系统，柔性电子学和光子学，这些技术要求材料的先进性能。具有可设计的光学特性的超颖表面现已被广泛研究用于柔性光子器件。通过微机电系统（MEMS）和微流体技术的支持，基于机械驱动的可重构超颖表面为柔性和可调设备提供了新的方法。在这种观点下，我们介绍了基于MEMS驱动，液滴阵列，柔性基板和微流体系统的超表面，以及它们在柔性和可调设备上的应用。