In this work, a direct space charge calculation method for thermal pulse method data analysis is proposed. Combining the equation of temperature in the tested film with the heat conduction equation, the Fredholm integral equation of the first kind with the direct goal of space charge distribution in the frequency domain is deduced. This ill-posed equation is solved by approximation algorithm with some numerical examples in this study. The simulation results show that the new data analysis method is able to reduce unreasonable oscillations in great extent. The distinct low sensitivity to the deliberately added noise for calculating space charge profiles is found as another advantage of the method. The related fast and effective calibration method is also suggested for space charge measurement and the subsequent calibration method for electric field profiles with or without applied field.

中文翻译：

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热脉冲法的空间电荷数据分析

在这项工作中，提出了一种用于热脉冲法数据分析的直接空间电荷计算方法。将被测薄膜的温度方程与热传导方程相结合，推导出以频域空间电荷分布为直接目标的第一类Fredholm积分方程。该不适定方程是通过近似算法求解的，并在本研究中使用了一些数值例子。仿真结果表明，新的数据分析方法能够在很大程度上减少不合理的振荡。发现用于计算空间电荷分布的故意添加的噪声的明显低灵敏度是该方法的另一个优点。