We propose a highly sensitive capacitive pressure sensor made of hollow polydimethylsiloxane (PDMS) foam with a three-dimensional network structure. The stiffness of the foam is adjusted by the viscosity of the PDMS solution. The fabricated PDMS-30 (PDMS 30 wt%) foam shows extremely high porosity (> 86%) approximately 19 times that of bare PDMS (PDMS 100 wt%) foam. Capacitive pressure sensors fabricated using the foam possess high sensitivity, good compressibility (up to 80% strain), and consistent output characteristics in a 2000-cycle test.

中文翻译：

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具有3D互连网络的空心聚二甲基硅氧烷（PDMS）泡沫，用于高度灵敏的电容式压力传感器

我们提出了一种高灵敏度的电容式压力传感器，该传感器由具有三维网络结构的中空聚二甲基硅氧烷（PDMS）泡沫制成。泡沫的硬度通过PDMS溶液的粘度来调节。制成的PDMS-30（PDMS 30 wt％）泡沫显示出极高的孔隙率（> 86％），约为裸PDMS（PDMS 100 wt％）泡沫的19倍。使用泡沫材料制造的电容式压力传感器具有高灵敏度，良好的可压缩性（高达80％的应变），并且在2000次循环测试中具有一致的输出特性。