Fabricating micro-scale features in ceramic materials, such as alumina (Al₂O₃), is challenging because of their high hardness and brittleness. Laser-assisted machining, in which a laser beam is a heat source for pre-softening the local area on a workpiece, is an effective hybrid method for machining ceramics. The study identified the effects of carbon dioxide (CO₂) laser-assisted micro-grinding (LAMG) with a wire electrical discharge grinding polycrystalline diamond tool on Al₂O₃. Comprehensive investigations have been conducted on the effects of laser beam machining itself and the effect of machining parameters, such as laser beam power, axial depth of cut, and feed rate. The average grinding force was found to decrease by 46% in the thrust direction and 44% in the feed direction, and surface roughness decreased by 17% with LAMG. Moreover, machining at a higher feed rate was possible without tool fracture. The results indicate that the CO₂ laser heating of Al₂O₃ has significant advantages over conventional methods regarding machinability and channel geometry. Finally, an improved LAMG process to prevent edge cracks by revising the machining conditions is proposed.

由于其高硬度和脆性，因此在陶瓷材料（例如氧化铝（Al ₂ O ₃））中制造微米级特征具有挑战性。激光辅助加工是一种有效的混合加工陶瓷的方法，其中激光束是用于预软化工件上局部区域的热源。该研究确定了采用线材放电研磨多晶金刚石工具的二氧化碳（CO ₂）激光辅助微粉碎（LAMG）对Al ₂ O _3的影响。已经对激光束加工本身的效果以及加工参数（例如激光束功率，轴向切削深度和进给速度）的影响进行了全面研究。发现平均磨削力在推力方向上降低了46％，在进给方向上降低了44％，而LAMG表面粗糙度降低了17％。此外，可以以更高的进给速率进行加工而不会造成刀具断裂。结果表明，在切削性和通道几何形状方面，Al ₂ O ₃的CO ₂激光加热具有优于常规方法的显着优势。最后，提出了一种改进的LAMG工艺，通过修改加工条件来防止边缘裂纹。