Recently, integrated photonics has attracted considerable interest owing to its wide application in optical communication and quantum technologies. Among the numerous photonic materials, lithium niobate film on insulator (LNOI) has become a promising photonic platform owing to its electro-optic and nonlinear optical properties along with ultralow-loss and high-confinement nanophotonic lithium niobate waveguides fabricated by the complementary metal–oxide–semiconductor (CMOS)-compatible microstructure engineering of LNOI. Furthermore, ferroelectric domain engineering in combination with nanophotonic waveguides on LNOI is gradually accelerating the development of integrated nonlinear photonics, which will play an important role in quantum technologies because of its ability to be integrated with the generation, processing, and auxiliary detection of the quantum states of light. Herein, we review the recent progress in CMOS-compatible microstructure engineering and domain engineering of LNOI for integrated lithium niobate photonics involving photonic modulation and nonlinear photonics. We believe that the great progress in integrated photonics on LNOI will lead to a new generation of techniques. Thus, there remains an urgent need for efficient methods for the preparation of LNOI that are suitable for large-scale and low-cost manufacturing of integrated photonic devices and systems.

近来，由于集成光子学在光通信和量子技术中的广泛应用，引起了广泛的兴趣。在众多光子材料中，绝缘体上的铌酸锂膜（LNOI）凭借其电光和非线性光学特性以及由互补金属氧化物制成的超低损耗和高约束纳米光子化铌酸锂波导，已成为一个有前途的光子平台。 LNOI的–CMOS（CMOS）兼容微结构工程。此外，铁电领域工程与LNOI上的纳米光子波导相结合，正在逐步加速集成非线性光子学的发展，由于其能够与生成，处理，集成相结合的能力，它将在量子技术中发挥重要作用。辅助检测光的量子态。本文中，我们回顾了用于集成铌酸锂光子学的LNOI的CMOS兼容微结构工程和LNOI领域工程学的最新进展，涉及光子调制和非线性光子学。我们相信，LNOI集成光子学的巨大进步将催生新一代技术。因此，迫切需要适合于大规模和低成本制造集成光子器件和系统的用于制备LNOI的有效方法。我们相信，LNOI集成光子学的巨大进步将催生新一代技术。因此，迫切需要适合于大规模和低成本制造集成光子器件和系统的用于制备LNOI的有效方法。我们相信，LNOI集成光子学的巨大进步将催生新一代技术。因此，迫切需要适合于大规模和低成本制造集成光子器件和系统的用于制备LNOI的有效方法。