The 400 keV proton implantation with a fluence of [Formula: see text] ions/cm2 was applied on the [Formula: see text] co-doped phosphate glass to fabricate a planar waveguide structure. The mode profile at the end face of the waveguide was measured by the end-face coupling technique. The energy loss profile of the energetic protons was calculated by the SRIM 2013. The refractive index distribution was simulated by the reflectivity calculation method. Based on these results, the formation theory of the planar waveguides was discussed through simulating the energy loss distribution and analyzing the reconstructed refractive index profile, which could be used for applications in the future integrated optical systems.

中文翻译：

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H+离子注入形成的Er3+/Yb3+共掺杂磷酸盐玻璃波导

400 keV 质子注入，能量密度为 [公式：见正文] ions/cm2应用于[公式：见正文]共掺杂磷酸盐玻璃以制造平面波导结构。通过端面耦合技术测量波导端面的模式分布。高能质子的能量损失曲线由 SRIM 2013 计算。折射率分布由反射率计算方法模拟。基于这些结果，通过模拟能量损失分布和分析重建的折射率分布，讨论了平面波导的形成理论，可用于未来集成光学系统中的应用。