Improved retention of desirable chemical structures during plasma polymerization requires rational tailoring of plasma‐phase conditions. Using ethyl trimethylacetate, we studied the effects of pressure and power on the contribution of intact molecular ions to deposition and retention of ester groups. The abundance of protonated molecular ions in plasmas varies with pressure and power, but the functionality of plasma polymers, assessed by X‐ray photoelectron spectroscopy and time‐of‐flight secondary ion mass spectrometry, is not correlated. Together with high ion flux, the ion energy distribution was found to be a key parameter and needs to be tailored to enable the soft landing of ions on the surface after traversing the sheath. The compromise between the abundance of ions and their energy distribution is optimal near the transition between the α and γ plasma phases.

中文翻译：

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优化血浆聚合物化学功能的合理方法：以三甲基乙酸乙酯为例的研究

在等离子体聚合过程中改善所需化学结构的保留要求合理地调整等离子体相的条件。使用三甲基乙酸乙酯，我们研究了压力和功率对完整分子离子对酯基团沉积和保留的贡献。血浆中质子化分子离子的丰度随压力和功率而变化，但是通过X射线光电子能谱和飞行时间二次离子质谱法评估的等离子聚合物的功能无关。发现离子能量分布与高离子通量一起是关键参数，需要进行调整以使离子在穿过护套后能够在表面上软着陆。