Due to the importance of the usage of nano-technology based fluids in several industrial processes, the presented research deals with mathematical modeling of a comb-drive MEMS-based sensor for determinations of the physical properties of nanofluids. The proposed sensor is made up of a driving comb, sensing comb, and a sensing plate. It is actuated longitudinally via the electrostatic force created by applying an AC voltage to the driving section of the sensor. The coupled equations of the vibration of the lumped dynamic mass and the nanoscale fluid field have been derived and solved simultaneously. Frequency analysis of the dynamic model indicates that a nanofluid has inertial and damping effects on the longitudinal vibration of the structure. Therefore, the viscosity and density of a nanofluid can be measured simultaneously via the detection of the resonance frequency and resonance amplitude changes of the structure. The practical restrictions of the applied AC voltage for the linear dynamic behavior of the structure have also been presented.

由于在几个工业过程中使用基于纳米技术的流体非常重要，因此本研究涉及用于确定纳米流体物理特性的基于梳齿驱动MEMS的传感器的数学建模。提出的传感器由驱动梳，感应梳和感应板组成。它通过向传感器的驱动部分施加交流电压而产生的静电力纵向驱动。集总的动态质量的振动和纳米级流场的耦合方程已被导出并同时求解。动力学模型的频率分析表明，纳米流体对结构的纵向振动具有惯性和阻尼作用。因此，通过检测结构的共振频率和共振幅度变化，可以同时测量纳米流体的粘度和密度。还提出了施加交流电压对结构的线性动态行为的实际限制。