The main morphological parameters of 50-ohm Au/ i -GaAs{100} thin-film microwave microstrip gold coplanar transmission lines of the length l _W affecting the active resistance of their skin layer R and inductance L are determined. It is found that the lateral character of the grain distribution and developed relief of their surfaces causes the appearance of additional electron scattering both at grain boundaries and at relief inhomogeneities. The small grain size d _x < 133 nm at frequencies of   f > 10 GHz transforms an abnormal skin-effect into the normal one. Herewith, the linear dependence of R on l _W in the local approximation is provided by the fractal geometry of the surface relief and near-surface region of coplanar transmission lines, while the nonlinear dependence of the inductance L on l _W is provided not only by the fractal relief features of the two-dimensional surface of coplanar transmission lines but also by the fractal features of the three-dimensional distribution of its grains.

中文翻译：

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微波微带线表面形貌对其传输性能的影响

确定了影响其表皮层 R 和电感 L 的长度为 l _W 的50欧姆Au / i -GaAs {100}薄膜微波微带金共面薄膜传输线 的主要形态参数 。已经发现，晶粒分布的侧向特性和表面的凸纹会在晶界和凸纹不均匀处引起额外的电子散射。在 f > 10 GHz的频率下，小晶粒尺寸 d _x <133 nm，   将异常的皮肤效应转换为正常的皮肤效应。因此， R 的线性依赖性 通过共面传输线的表面起伏和近表面区域的分形几何来提供局部近似上的 L _W ，而电感 L 对 I _W 的非线性依赖性 不仅由两者的分形释放特征来提供共面传输线的三维表面，也受其晶粒三维分布的分形特征影响。