Surface acoustic wave (SAW) temperature and pressure sensors have been rapidly developed. A surface acoustic wave sensor with a dual-port delay line structure was designed and optimized by COMSOL software. The temperature and pressure measurement accuracy of the sensor is studied. In the signal measurement system, the signal is processed by the mixing detection method and the phase detection method. The perturbation quantity of pressure and temperature can be obtained by analyzing the perturbation relation between frequency and pressure, phase, and temperature. The results show that the sensitivity of the sensor is 339.175 kHz/ N in the micro-pressure measurement of 0–0.2 N. The frequency error after optimization is between –3.3 and 4 kHz, and the error rate is 2.95%. In the case of 25–95°C, the sensitivity of the sensor is 0.045861 rad/°C. It lays a foundation for the research of the SAW multi-parameter measuring sensor.

中文翻译：

---

基于延迟线型的声表面波温度压力双参数测量传感器的研究

表面声波（SAW）温度和压力传感器已经得到快速发展。利用COMSOL软件设计并优化了具有双端口延迟线结构的声表面波传感器。研究了传感器的温度和压力测量精度。在信号测量系统中，通过混合检测方法和相位检测方法处理信号。通过分析频率与压力，相位和温度之间的扰动关系，可以获得压力和温度的扰动量。结果表明，传感器的灵敏度为339.175 kHz / N 在0-0.2 N的微压测量中，优化后的频率误差在–3.3至4 kHz之间，误差率为2.95％。在25–95°C的情况下，传感器的灵敏度为0.045861 rad /°C。为SAW多参数测量传感器的研究奠定了基础。