Efficiency-enhanced and high-precision input common-mode feedback control (ICMFB) is proposed for a fully differential readout circuit of the MEMS capacitive sensor. This ICMFB improves the efficiency and performance of input common-mode voltage control using a smaller feedback capacitor. The noise performance of the readout circuit is improved as a decrease of a feedback capacitor. The correlated level shift (CLS) technique is used to improve the output swing of the amplifier therefore reduce the value of a feedback capacitor. Also, the oversampling successive approximation (OSA) technique is used to improve the accuracy of input common-mode voltage control using a low-gain op-amp. Simulation results show that the input common-mode voltage error decreases to 0.01% when the value of the feedback capacitor is the same as the MEMS sensor. Also, the noise power spectral density of the readout circuit increases by 10 dB.

中文翻译：

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使用OSA–CLS技术的输入共模反馈控制的效率增强和高精度

针对MEMS电容传感器的全差分读出电路，提出了效率增强和高精度输入共模反馈控制（ICMFB）。该ICMFB使用较小的反馈电容器提高了输入共模电压控制的效率和性能。随着反馈电容器的减少，读出电路的噪声性能得以改善。相关电平移位（CLS）技术用于改善放大器的输出摆幅，因此减小了反馈电容器的值。同样，过采样逐次逼近（OSA）技术用于提高使用低增益运算放大器的输入共模电压控制的精度。仿真结果表明，当反馈电容的值与MEMS传感器的值相同时，输入共模电压误差降低至0.01％。也，