We present a method of ozonation to form the rear-side passivation layers of crystalline silicon PERC cells. In the method, a thin aluminum film was deposited on the back surface of a silicon wafer and then was oxidized into an aluminum oxide layer by gaseous ozone. Lifetimes of the wafers with such passivation layers proved to be increased with respect to those untreated, and the resultant PERC cells showed a performance improvement compared with standard cells with full back surface fields.

中文翻译：

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背面带有臭氧化 AlOx 钝化层的晶体硅 PERC 太阳能电池

我们提出了一种臭氧化方法来形成晶体硅 PERC 电池的背面钝化层。该方法是在硅片的背面沉积一层薄铝膜，然后通过气态臭氧将其氧化成氧化铝层。与未处理的相比，具有这种钝化层的晶片的寿命被证明增加了，并且与具有完整背面场的标准电池相比，所得的 PERC 电池显示出性能改进。