A single-step sol-gel technological approach combining sol-gel layer development and UV lithography is demonstrated for the fabrication of resonant waveguide gratings (RWG) on planar and cylindrical substrates. The aim of this article is the demonstration of a resonant reflection in TE and TM polarization in the near-infrared region (NIR) in a planar and in cylindrical-based resonant waveguide gratings (RWG). In this work, we start with a planar corrugated waveguide structure excited by a planar wave and demonstrate this concept to a circularly symmetrical waveguide applied to the inside wall of an 8 mm diameter tube, excited by a cylindrical wave. For both configurations, the same TiO2 sol-gel layer is used for the high index waveguide layer and for the grating printing thanks to the UV photosensitivity property of the sol-gel layers, avoiding any etching processes. The reflection spectrum was measured in the near-infrared range and compared to the modeling, showing the expected resonant behavior.

中文翻译：

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使用光敏 TiO2 溶胶-凝胶方法在平面和圆柱形衬底上制造谐振波导光栅

展示了一种结合溶胶-凝胶层开发和 UV 光刻的单步溶胶-凝胶技术方法，用于在平面和圆柱形基板上制造谐振波导光栅 (RWG)。本文的目的是演示平面和圆柱谐振波导光栅 (RWG) 中近红外区域 (NIR) 中 TE 和 TM 偏振的谐振反射。在这项工作中，我们从由平面波激发的平面波纹波导结构开始，并将这个概念展示给应用于直径为 8 毫米的管内壁的圆形对称波导，由圆柱波激发。对于这两种配置，由于溶胶-凝胶层的 UV 光敏特性，相同的 TiO2 溶胶-凝胶层用于高折射率波导层和光栅印刷，避免任何蚀刻过程。反射光谱是在近红外范围内测量的，并与模型进行比较，显示出预期的共振行为。