Abstract The feasibility of conducting polymer bending actuators deposited on free-standing conductive silicon cantilevers was studied in this work. The motivation is the micro-system-technique, where mostly silicon bimorph piezoelectric actuators have been applied. Polypyrrole (PPy) and poly(3,4-ethylenedioxythiophene) (PEDOT) with various formation potentials were studied. The formation potential 1.1 V was found optimal for both materials, while PEDOT outperformed PPy in virtually every aspect. Long-term durability tests of 1000 cycles showed that activity was maintained, with PEDOT holding up better than PPy. The results show that conducting polymers, especially PEDOT, could be viable active materials for Si-based bilayer actuators, with low driving voltages to reach significant displacements.

中文翻译：

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硅悬臂梁上的聚吡咯和聚（3,4-亚乙基二氧噻吩）：地层电位在弯曲位移中的作用

摘要 在这项工作中研究了沉积在独立导电硅悬臂上的导电聚合物弯曲致动器的可行性。动机是微系统技术，其中主要应用了硅双晶压电致动器。研究了具有各种形成潜力的聚吡咯 (PPy) 和聚 (3,4-亚乙基二氧噻吩) (PEDOT)。发现两种材料的形成电位为 1.1 V 是最佳的，而 PEDOT 几乎在各个方面都优于 PPy。1000 次循环的长期耐久性测试表明活性得以保持，PEDOT 比 PPy 保持得更好。结果表明，导电聚合物，尤其是 PEDOT，可以作为硅基双层致动器的可行活性材料，具有低驱动电压以达到显着位移。