In this paper, a periodic structure based on metallic split-ring resonators is integrated into micro-bridge structures of THz microbolometer array to achieve high THz wave absorption in a wide frequency range. With a small unit size of 35 μm × 35 μm, the effect of split-ring structure on THz wave absorption characteristics of the multilayer structure array is studied to manipulate the resonance absorption frequencies. The absorption bandwidth is effectively increased by integrating a combined structure of split-ring and metallic disk. Broadband THz absorption is formed by coupling the absorption peaks of different structures. The periodic structure of dual-ring combined with a metallic disk provides a broadband THz wave absorption in the range of 4–7 THz. The highest absorption in the band reaches 90% and the lowest absorption is higher than 40%. The designed structure is process-compatible and easy to implement for small-pixel THz microbolometers with high absorption in a wide spectrum range. The research provides a scheme for broadband THz sensing and real-time imaging at room temperature.

在本文中，将基于金属开口环谐振器的周期性结构集成到THz微辐射热计阵列的微桥结构中，以在较宽的频率范围内实现高THz波吸收。以35μm×35μm的小单元尺寸，研究了开环结构对多层结构阵列的THz波吸收特性的影响，以控制共振吸收频率。通过组合开口环和金属盘的组合结构，可以有效地增加吸收带宽。宽带太赫兹吸收是通过耦合不同结构的吸收峰形成的。双环与金属盘结合的周期性结构可提供4-7 THz范围内的宽带THz波吸收。该带中的最高吸收达到90％，最低吸收高于40％。设计的结构与工艺兼容，并且易于在宽光谱范围内具有高吸收率的小像素THz微辐射热计中实现。该研究为室温下的宽带太赫兹感测和实时成像提供了一种方案。