The paper describes the device and operating principle of a high-precision positioning drive based on a magnetorheological (MR) elastomer for micro-drilling blind holes in multilayer printed circuit boards. The results of experimental studies of a drive with a closed control system for step-by-step movement are presented. The operation of the drive in the mode of active vibration isolation is shown and the coefficient of transmission of the vibration displacement amplitude is determined.

中文翻译：

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印制电路板微钻孔技术

本文介绍了一种基于磁流变 (MR) 弹性体的高精度定位驱动器的装置和工作原理，用于在多层印刷电路板上进行微钻孔盲孔。介绍了具有步进运动的闭式控制系统的驱动器的实验研究结果。显示了驱动器在主动隔振模式下的运行情况，并确定了振动位移幅值的传递系数。