The powders of different phase compositions in the Li₂O-ZnO-TiO₂ system were prepared. These powders can be used as major components in microelectronic devices production using Low Temperature Cofired Ceramic (LTCC) technology. The influence of factors such as the synthesis temperature and holding time on phase transformations processes and composition of synthesized powders were studied. It was determined that the synthesis of Li₂ZnTi₃O₈ and Li₂Zn₃Ti₄O₁₂ compounds can be carried out at 850-900 C. At the same time, the synthesized phases are extremely sensitive to the ratio of the initial components.

中文翻译：

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用于低温共烧陶瓷（LTCC）生产的Li ₂ ZnTi ₃ O ₈和Li ₂ Zn ₃ Ti ₄ O ₁₂粉末的合成

制备了Li ₂ O-ZnO-TiO ₂体系中不同相组成的粉末。这些粉末可用作使用低温共烧陶瓷（LTCC）技术的微电子设备生产中的主要成分。研究了合成温度和保温时间等因素对相变过程和合成粉体组成的影响。已确定Li ₂ ZnTi ₃ O ₈和Li ₂ Zn ₃ Ti ₄ O ₁₂化合物的合成可以在850-900℃下进行。同时，合成相对初始比例的变化极为敏感。成分。