Abstract

We consider the excitation and absorption of waves in a magnetoactive rf discharge plasma in the conditions when the generator frequency is lower than the electron cyclotron frequency. We consider the cases of unconfined and confined plasmas in the cylindrical geometry and different regimes of excitation of plasma waves with different dispersion relations and field polarizations. The power input to the plasma depends on the distribution of external-source currents initiating the discharge and on the density parameter characterizing the plasma density and transverse sizes of the system. In the case of a plasma cylinder with a free surface or a plasma cylinder in a large conducting casing, which is most interesting for applications, plasma contains only potential and nonpotential E-type oblique Langmuir waves as well as a strongly nonpotential surface wave. The latter wave is practically not excited by external currents flowing over the cylinder surface for real parameters of the system. For high values of the density parameter, the effective resistance of the plasma with inducting excitation of the discharge is predominant. For moderate and low values of this parameter, capacitive excitation of the wave by the current on the plasma cylinder surface is found to be most effective.

中文翻译：

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磁功率射频放电等离子体中谐振功率输入的机制

摘要

在发生器频率低于电子回旋加速器频率的条件下，我们考虑了磁活性rf放电等离子体中波的激发和吸收。我们考虑了圆柱几何形状中无约束和受限等离子体的情况，以及具有不同色散关系和场极化的等离子体波激发的不同制度。输入到等离子体的功率取决于启动放电的外部源电流的分布，并取决于表征系统的等离子体密度和横向尺寸的密度参数。对于具有自由表面的等离子圆柱体或大型导电外壳中的等离子圆柱体，这是最有趣的应用，等离子仅包含电势和非电势E型斜朗缪尔波以及强非势面波。对于系统的实际参数，后一种波实际上不受流过气缸表面的外部电流的激励。对于高的密度参数值，等离子体的有效电阻以及放电的感应激发是主要的。对于此参数的中值和低值，发现等离子体圆柱表面上的电流对波的电容性激励最为有效。