Disc gyroscope manufactured through microelectromechanical systems (MEMS) fabrication processes becomes one of the most critical solutions for achieving high performance. Some reported novel disc constructions acquire good performance in bias instability, scale factor nonlinearity, etc. However, antivibration characteristics are also important for the devices, especially in engineering applications. For multi-ring structures with central anchors, the out-of-plane motions are in the first few modes, easily excited within the vibration environment. The paper presents a multi-ring gyro with good dynamic characteristics, operating at the first resonant mode. The design helps obtain better static performance and antivibration characteristics with anchor points outside of the multi-ring resonator. According to harmonic experiments, the nearest interference mode is located at 30,311 Hz, whose frequency difference is 72.8% far away from working modes. The structures were fabricated with silicon on insulator (SOI) processes and wafer-level vacuum packaging, where the asymmetry is 780 ppm as the frequency splits. The gyro also obtains a high Q-factor. The measured value at 0.15 Pa was 162 k, which makes the structure have sizeable mechanical sensitivity and low noise.

中文翻译：

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在第一共振模式下运行的高Q因子外框锚陀螺仪

通过微机电系统（MEMS）制造工艺制造的盘式陀螺仪成为实现高性能的最关键解决方案之一。一些已报道的新型光盘结构在偏置不稳定性，比例因子非线性等方面均具有良好的性能。但是，抗振动特性对设备也很重要，尤其是在工程应用中。对于具有中心锚的多环结构，平面外运动处于前几个模式，在振动环境中容易激发。本文提出了一种具有良好动态特性的多环陀螺仪，该陀螺仪在第一共振模式下工作。该设计通过在多环谐振器外部的定位点帮助获得更好的静态性能和抗振特性。根据谐波实验，最近的干扰模式位于30,311 Hz，其频率差与工作模式相差72.8％。这些结构是用绝缘体上硅（SOI）工艺和晶圆级真空封装制造的，随着频率的分裂，其不对称度为780 ppm。陀螺仪也获得高Q因子。0.15 Pa下的测量值为162 k，这使该结构具有相当大的机械灵敏度和低噪音。