In this article, we have explored the influence of Fe³⁺ ion on the surface morphological, structural, optical and electrical properties of TiO₂ thin films grown on glass substrates by thermal spray pyrolysis technique. The FESEM micrographs of the deposited TiO₂ thin films reveal that the surface consists of agglomerates of small grains. The anatase and rutile phase is confirmed by XRD and Debye-Scherer (D-S), Uniform Deformation Model (UDM) and Halder-Wagner (HW) method are employed to determine the structural parameters using XRD peak profile analysis. A red shift occurs in absorption spectra and band gap decreases with Fe content. The optical parameters such as skin depth, optical static dielectric constant, Urbach energy, etc and Electron-phonon interaction are increased with increasing Fe contents, whereas steepness parameter decreases. The electrical properties are studied by Hall Effect measurements. The paramount study is useful for standardizing the Fe-doped TiO₂ thin films for optoelectronic device applications.

在本文中，我们探讨了Fe ³⁺离子对通过热喷涂热解技术在玻璃基板上生长的TiO ₂薄膜的表面形态，结构，光学和电学性质的影响。沉积的TiO ₂的FESEM显微照片薄膜表明表面由小颗粒的团聚体组成。通过XRD和Debye-Scherer（DS）确认了锐钛矿和金红石相，采用XRD峰轮廓分析采用均匀变形模型（UDM）和Halder-Wagner（HW）方法确定结构参数。吸收光谱中发生红移，并且带隙随Fe含量的增加而减小。随着Fe含量的增加，诸如趋肤深度，光学静态介电常数，Urbach能量等光学参数以及电子-声子相互作用会增加，而陡度参数会降低。通过霍尔效应测量来研究电性能。最重要的研究对于标准化用于光电子器件应用的Fe掺杂的TiO ₂薄膜是有用的。