This letter presents experimental results showing significant enhancement in the dynamic performance of a novel piezoelectric micro-lens actuator using a robust feedback resonant controller. The design of the feedback controller is based on experimentally identified model of the micro-lens actuator. The stability of the closed-loop system is proven by the negative imaginary theory. The experimental results show that the resonance peak and the settling time of the actuator are reduced by 27 dB and to 2.5 ms from 119 ms, respectively. Such improvement demonstrates the capability of the piezoelectric micro-lens actuator for fast auto-focus application in miniaturized camera. The reported performance makes it the fastest micro-lens actuator compared to other previously reported micro-lens actuators. [2020-0313]

中文翻译：

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JMEMS Letters 压电驱动微透镜致动器的动态性能改进

这封信提供了实验结果，表明使用鲁棒反馈谐振控制器的新型压电微透镜致动器的动态性能显着增强。反馈控制器的设计基于微透镜致动器的实验识别模型。闭环系统的稳定性由负虚理论证明。实验结果表明，执行器的谐振峰值和稳定时间分别从 119 ms 减少了 27 dB 和 2.5 ms。这种改进证明了压电微透镜致动器在小型化相机中快速自动对焦应用的能力。与之前报道的其他微透镜致动器相比，所报告的性能使其成为最快的微透镜致动器。[2020-0313]