Body-biased micro-electro-mechanical (MEM) relays previously have been demonstrated to be a promising alternative to transistors for ultra-low voltage digital logic applications. A basic requirement for reliable relay-based circuit operation is suitably low and stable relay ON-state resistance (RON). In this work, the effect of body biasing on RON is investigated for relays of different contact designs. It is found that a single direct contact design not only provides for the smallest hysteresis voltage but also the smallest RON, making it the most suitable for low voltage applications. Body-biased operation is found to degrade RON stability over many ON/OFF switching cycles, however, due to a reduction in contact velocity.

中文翻译：

---

MEM继电器触点设计和体偏置对通态电阻稳定性影响的研究


体偏置微机电 (MEM) 继电器此前已被证明是超低电压数字逻辑应用中晶体管的有前途的替代品。基于继电器的电路可靠运行的基本要求是适当低且稳定的继电器导通电阻 (RON)。在这项工作中，研究了不同触点设计的继电器主体偏置对 RON 的影响。研究发现，单一直接接触设计不仅可以提供最小的磁滞电压，而且可以提供最小的 RON，使其最适合低压应用。然而，由于接触速度的降低，体偏置操作被发现会在许多开/关切换周期中降低 RON 稳定性。