Using broadband acoustic resonator spectroscopy, an almost twofold increase in the frequency of optimal excitation of the composite microwave resonator of shear bulk acoustic waves is found when the distance from the substrate to the magnetron axis during the deposition of a ZnO film by magnetron sputtering is changed. The frequency characteristics of the resonator structure are simulated and an explanation of the change in the optimal excitation frequency by the inhomogeneity of the inclination of the ZnO film texture’s axis over the thickness is proposed.

中文翻译：

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ZnO薄膜压电特性的声共振光谱空间分布研究。

使用宽带声谐振器光谱法，当通过磁控溅射沉积ZnO膜时从基板到磁控管轴的距离发生变化时，剪切体声波的复合微波谐振器的最佳激发频率几乎增加了两倍。 。对谐振器结构的频率特性进行了仿真，并提出了由ZnO薄膜织构轴的厚度方向上的倾斜度的不均匀性引起的最佳激励频率变化的解释。