Laser-processing system plays an important role in modern processing. To improve the precision of a galvanometer laser-processing system, a novel compensation method based on machine vision is proposed. First, the various errors existing in the scanning process of the galvanometer system and the influence on the accuracy of the scanning system were analyzed. Second, processing a specific grid within the processing range of the laser-processing system, the machine vision method was employed to extract the skeleton image and obtain the sub-pixel coordinates of each grid corner point. By comparing them with their theoretical positions, the position and error of all corner points of the mesh were obtained. Finally, the position and error of the four corner points in the arbitrary grid region were analyzed by the weighted interpolation method, and the error value and compensation value of any point in the grid were derived, and an error compensation model was established to compensate the scanning system. To verify the effectiveness of the proposed compensation method, a compensation experiment was conducted, and the workpiece machining accuracy after compensation was improved. The method is simple in operation, offers good compensation effect, and has important theoretical significance and practical value for improving the precision of laser-processing systems.

中文翻译：

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基于机器视觉的振镜激光加工系统误差补偿方法

激光加工系统在现代加工中占有重要地位。为提高振镜激光加工系统的精度，提出了一种基于机器视觉的补偿方法。首先分析了振镜系统扫描过程中存在的各种误差以及对扫描系统精度的影响。其次，在激光加工系统的加工范围内加工一个特定的网格，采用机器视觉方法提取骨架图像，得到每个网格角点的亚像素坐标。通过与理论位置的比较，得到网格各角点的位置和误差。最后，通过加权插值法分析任意网格区域内四个角点的位置和误差，推导出网格中任意一点的误差值和补偿值，建立误差补偿模型对扫描系统进行补偿。为验证所提补偿方法的有效性，进行了补偿实验，提高了补偿后的工件加工精度。该方法操作简单，补偿效果好，对提高激光加工系统的精度具有重要的理论意义和实用价值。