A correlative method to quantitatively image trace concentrations of elements by combined SIMS-EDX analysis,Journal of Analytical Atomic Spectrometry

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A correlative method to quantitatively image trace concentrations of elements by combined SIMS-EDX analysis
Journal of Analytical Atomic Spectrometry ( IF 3.1 ) Pub Date : 2020-11-26 , DOI: 10.1039/d0ja00289e
Lluís Yedra _{1,

2,

3,

4,

5} , C. N. Shyam Kumar _{1,

2,

3,

4,

5} , Alisa Pshenova _{1,

2,

3,

4,

5} , Esther Lentzen _{2,

3,

4,

5,

6} , Patrick Philipp _{1,

2,

3,

4,

5} , Tom Wirtz _{1,

2,

3,

4,

5} , Santhana Eswara _{1,

2,

3,

4,

5}

Affiliation

The study demonstrates a new method to quantify Secondary Ion Mass Spectrometry (SIMS) data by using a synergetic combination of Energy Dispersive X-ray spectroscopy (EDX) and SIMS. The novelty of this approach lies in using a diffusion couple to produce a continuum of concentration variation to cover a large portion of the composition space (100 at% to sub-1000 ppm) in a single sample. Furthermore, this approach encompasses the concentration-dependent Relative Sensitivity Factor (RSF) which is essential when the concentrations span several orders of magnitude. By correlating EDX and SIMS profiles, the SIMS signal intensity can be converted to concentrations far below the detection limit of the EDX technique.

中文翻译：

通过组合SIMS-EDX分析定量成像痕量元素的相关方法

这项研究展示了一种通过能量色散X射线能谱（EDX）和SIMS的协同组合来量化二次离子质谱（SIMS）数据的新方法。这种方法的新颖之处在于使用扩散对产生了一个连续的浓度变化，以覆盖单个样品中的大部分成分空间（100 at％至低于1000 ppm）。此外，这种方法还包括浓度相关的相对灵敏度因子（RSF），当浓度跨越几个数量级时，该因子必不可少。通过关联EDX和SIMS配置文件，可以将SIMS信号强度转换为远低于EDX技术检测极限的浓度。

更新日期：2020-11-27

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