In this article, we propose the design and analysis of all-dielectric metasurface based tunable optical modulator. The metasurface structure consists of split silicon arcs mounted over the indium tin oxide layer and the silica substrate. The nematic liquid crystal is used for tuning the Fano resonance peak of the metasurface and is filled between two indium tin oxide layers. The numerical investigation of the proposed metasurface for electro-optic modulation shows the modulator has a broadband tunability of 25 nm and modulation depth of 90 %. We have also numerically investigated the variation of the Fano resonance peak arising due to the fabrication non-uniformities in the thickness, width and the split gap of the silicon arc.

在本文中，我们提出了基于全介电超表面的可调谐光调制器的设计和分析。超表面结构由安装在铟锡氧化物层和二氧化硅衬底上的分裂硅弧组成。向列液晶用于调整超表面的Fano共振峰，并填充在两个铟锡氧化物层之间。对拟议的用于电光调制的超颖表面的数值研究表明，该调制器具有25 nm的宽带可调性和90％的调制深度。我们还从数值上研究了由于硅弧的厚度，宽度和裂隙的制造不均匀而引起的Fano共振峰的变化。