Electrostatic energy analyzers are key instruments in the wide field of the Electron Spectroscopy, and the Auger Electron Spectroscopy is one of commonly used technique within this area. The paper presents a new energy analyzer based on combination of a face-field and CMA configurations and some experimental Auger spectra obtained from nanostructures synthesized. The data obtained show that the presented analyzer's energy resolution and design parameters are superior to the data of the well known standard CMA.

中文翻译：

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用于纳米技术的静电能分析仪

静电能分析仪是电子光谱学领域的关键仪器，俄歇电子能谱学是该领域最常用的技术之一。本文提出了一种基于面场和CMA配置以及从合成的纳米结构获得的一些实验俄歇光谱的新型能量分析仪。获得的数据表明，所提出的分析仪的能量分辨率和设计参数优于众所周知的标准CMA的数据。