Quantitative prediction of the smoothing of mid-spatial frequency errors (MSFE) is urgently needed to realize process guidance for computer controlled optical surfacing (CCOS) rather than a qualitative analysis of the processing results. Consequently, a predictable time-dependent model combining process parameters and an error decreasing factor (EDF) were presented in this paper. The basic smoothing theory, solution method and modification of this model were expounded separately and verified by experiments. The experimental results show that the theoretical predicted curve agrees well with the actual smoothing effect. The smoothing evolution model provides certain theoretical support and guidance for the quantitative prediction and parameter selection of the smoothing of MSFE.

中文翻译：

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用于计算机控制抛光的可预测的平滑演变模型

迫切需要对中空频率误差（MSFE）的平滑度进行定量预测，以实现计算机控制光学堆焊（CCOS）的过程指导，而不是对处理结果进行定性分析。因此，本文提出了一种可预测的时变模型，该模型结合了过程参数和误差减小因子（EDF）。分别阐述了该模型的基本平滑理论，求解方法和改进，并通过实验进行了验证。实验结果表明，理论预测曲线与实际平滑效果吻合良好。平滑演化模型为MSFE平滑的定量预测和参数选择提供了一定的理论支持和指导。