This review focuses on the physical and chemical vapor deposition methods applied to the preparation of all-inorganic metal halide perovskites. Particular emphasis is devoted to the specific characteristic of the available approaches explored in the current literature for lead-based and lead-free films with also examples of the preparation of microstructure and nanostructure for applications beyond perovskite solar cells. Main characteristics, device architectures, and pros and cons of exploited vapor deposition methods are highlighted, providing a guide for future research in the field of all-inorganic perovskite growth.

中文翻译：

---

适用于全无机金属卤化物钙钛矿的物理和化学气相沉积方法

这篇综述着重于用于制备全无机金属卤化物钙钛矿的物理和化学气相沉积方法。特别强调当前文献中针对铅基和无铅薄膜探索的可用方法的具体特性，以及制备钙钛矿太阳能电池以外应用的微结构和纳米结构的示例。重点介绍了主要特征，器件架构以及利用气相沉积法的利弊，为今后在全无机钙钛矿生长领域的研究提供了指南。