The use of peak fitting to extract information from x-ray photoelectron spectroscopy (XPS) data is of growing use and importance. Due to increased instrument accessibility and reliability, the use of XPS instrumentation has significantly increased around the world. However, the increased use has not been matched by the expertise of the new users, and the erroneous application of curve fitting has contributed to ambiguity and confusion in parts of the literature. This guide discusses the physics and chemistry involved in generating XPS spectra, describes good practices for peak fitting, and provides examples of appropriate use along with tools for avoiding mistakes.

中文翻译：

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X射线光电子能谱曲线拟合实用指南

使用峰拟合从X射线光电子能谱（XPS）数据中提取信息的用途和重要性日益增加。由于增加了仪器的可访问性和可靠性，因此XPS仪器在全球范围内的使用已大大增加。但是，新用户的专业知识无法与之相提并论，曲线拟合的错误应用导致了部分文献中的歧义和混乱。本指南讨论了生成XPS光谱所涉及的物理和化学过程，描述了峰拟合的良好实践，并提供了正确使用示例以及避免错误的工具。