By means of a combined microscopy‐, spectroscopy‐, and tomography‐based approach, we investigated surface and interface defects in metal‐polymer heterostacks. The aim was to characterize both morphological and compositional alterations of the surfaces, originating in the physical vapor deposition (PVD) growth methods adopted in the fabrication process. Synchrotron radiation X‐ray computed tomography (CT) and scanning electron microscopy (SEM) coupled with energy dispersive X‐ray Spectroscopy (EDS) indicate that both chemical contaminations, introduced in the fabrication process, and growth conditions strongly affect the presence of defects. On the basis of our results, we classified the defects into four main families. Interestingly, the faults are mainly located at the metal‐polymer interface. Thanks to this study, we have been able to gain a deeper insight into the defects' origins and nature, allowing the identification of the precise production steps involved in the generation of the selected defects.

中文翻译：

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在表面和界面缺陷的起源上，与铝涂层热塑性异质堆的生长有关

通过结合基于显微镜，光谱和层析成像的方法，我们研究了金属聚合物异质堆叠中的表面和界面缺陷。目的是表征表面的形态和成分变化，这些变化源于制造过程中采用的物理气相沉积（PVD）生长方法。同步辐射X射线计算机断层扫描（CT）和扫描电子显微镜（SEM）结合能量色散X射线光谱（EDS）表明，制造过程中引入的化学污染和生长条件都严重影响缺陷的存在。根据我们的结果，我们将缺陷分为四个主要家族。有趣的是，断层主要位于金属-聚合物界面。多亏这项研究，