Emission spectra of neural tungsten (W) sputtered by impact of argon (Ar) ions in a weakly magnetized (<0.1 T) Ar plasma were measured using a high resolution spectrometer at normal incidence angle to the surface. The measurements were performed for the mono-energetic impact energies between 70 and 150 eV using the neutral tungsten (W I) line at 4982.593 . The line shape of this line was simulated using a Doppler-shifted emission model to determine the energy distribution. Additional broadening mechanisms were taken into account: instrumental broadening, Zeeman effect and finally the photon or light reflectance at the W surface.

The obtained energy distribution was found in a very good agreement with the Thompson distribution, even though deviations for lower impact energies are observed, e.g. the high-energy tail of sputtered particles demonstrates a faster drop compared to 1/E ² at energies below 100 eV. Moreover, the standard cosine (Knudsen cosine law) distribution provides a rather good description of emission spectra in the energy range of study. Finally, the energy distribution was also compared with simulations carried out with the binary collision approximation (BCA) based Monte-Carlo code SDTrimSP. It shows a marginally worse description at low energies and better description of the high energy tail compared to the Thompson one. Furthermore, the model was used to determine in-situ the degree of light reflection at the W surface. The results are in excellent agreement with the literature data.

使用高分辨率光谱仪以垂直于表面的入射角测量了在弱磁化（<0.1 T）Ar等离子体中由于氩（Ar）离子的撞击而溅射的神经钨（W）的发射光谱。使用在4982.593处的中性钨（WI）线，对70至150 eV之间的单能冲击能量进行了测量。使用多普勒频移发射模型对这条线的线形进行仿真，以确定能量分布。还考虑了其​​他加宽机制：仪器加宽，塞曼效应以及最后在W表面的光子或光反射率。

发现获得的能量分布与汤普森分布非常吻合，即使观察到较低冲击能量的偏差也是如此，例如，在能量低于100 eV时，溅射粒子的高能尾比1 / E ²下降得更快。。此外，标准余弦（努森余弦定律）分布在研究的能量范围内提供了相当好的发射光谱描述。最后，还将能量分布与使用基于二进制碰撞近似（BCA）的蒙特卡洛代码SDTrimSP进行的仿真进行比较。与汤普森一号相比，它在低能量状态下的描述稍差，而在高能量尾部的描述更好。此外，该模型还用于现场确定W表面的光反射程度。结果与文献数据非常吻合。