Abstract Chemical vapor deposition diamond (CVDD) has several advantages as micro mill material. Picosecond laser machining technology is promising method to machine CVDD, but there are multiple uncertainties. This study aims to optimize the irradiation of CVDD surface via controllable prediction of CVDD surface after picosecond laser irradiation. Based on theories of Gaussian pulse beam and picosecond laser ablation material, machined surface morphology model was developed to predict surface roughness Sa and removal depth of CVDD. Then, the effects of picosecond laser parameters on the morphology, roughness Sa, removal depth, and components of CVDD surface were analyzed. Results showed that the trend of changes in roughness and removal depth based on theoretical model was approximately the same as that in experimental machined surface, with average relative errors of roughness and removal depth of 9.6% and 16.6%, respectively. In addition, removal depth of CVDD surface decreased with the increase in scanning speed and filling pitch, and increased with the increase in average laser power. The variation in surface roughness Sa was the same as that of removal depth in terms of average laser power and scanning speed, while had a concave point at a filling pitch of 7.5 μm. A decrease in overlapping area of pulse spot can reduce the aggravation of sp2 hybrid amorphous carbon defects.

中文翻译：

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CVD金刚石皮秒激光烧蚀表面建模与成分分析

摘要 化学气相沉积金刚石（CVDD）作为微粉碎材料具有多种优势。皮秒激光加工技术是加工CVDD的有前途的方法，但存在多重不确定性。本研究旨在通过对皮秒激光照射后 CVDD 表面的可控预测来优化 CVDD 表面的照射。基于高斯脉冲光束和皮秒激光烧蚀材料的理论，建立了加工表面形貌模型来预测CVDD的表面粗糙度Sa和去除深度。然后，分析了皮秒激光参数对CVDD表面形貌、粗糙度Sa、去除深度和成分的影响。结果表明，基于理论模型的粗糙度和去除深度的变化趋势与实验加工表面大致相同，粗糙度和去除深度的平均相对误差分别为 9.6% 和 16.6%。此外，CVDD表面的去除深度随着扫描速度和填充间距的增加而减少，随着平均激光功率的增加而增加。在平均激光功率和扫描速度方面，表面粗糙度Sa的变化与去除深度的变化相同，但在7.5μm的填充间距处具有凹点。脉冲光斑重叠面积的减少可以减少sp2杂化非晶碳缺陷的恶化。在平均激光功率和扫描速度方面，表面粗糙度Sa的变化与去除深度的变化相同，但在7.5μm的填充间距处有一个凹点。脉冲光斑重叠面积的减少可以减少sp2杂化非晶碳缺陷的恶化。在平均激光功率和扫描速度方面，表面粗糙度Sa的变化与去除深度的变化相同，但在7.5μm的填充间距处有一个凹点。脉冲光斑重叠面积的减少可以减少sp2杂化非晶碳缺陷的恶化。