Abstract. In the beam control system, the correction of optical axis is an essential process of the optical system. Adjusting the installation angle of the relay mirror is an effective way to change the optical axis direction. However, due to the forced deviation of the installation angle from the theoretical design value, the supporting structure will produce greater stress, which will affect the surface accuracy of the mirror. Therefore, we present an optimization method that can reduce the sensitivity of mirror surface. First, the surface sensitivity is introduced to measure the surface accuracy under the forced deflection angle. Second, the external response function of surface sensitivity is realized by combining dynamic link library and MATLAB. At last, the topological structure is optimized with the sum of the sensitivity weights of two cases as the objective function and the dynamic resonance frequency as the constraint. The optimized structure shows that the surface sensitivity around the x axis decreases from 2.58 nm / ± 1 ″ to 0.32 nm / ± 1 ″ , and the surface sensitivity around the y axis decreases from 3.75 nm / ± 1 ″ to 0.09 nm / ± 1 ″ .

中文翻译：

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镜面支撑结构优化设计，降低表面敏感度

摘要。在光束控制系统中，光轴的校正是光学系统的一个必不可少的过程。调整中继镜的安装角度是改变光轴方向的有效方法。但由于安装角度与​​理论设计值的强制偏差，支撑结构会产生较大的应力，从而影响反射镜的表面精度。因此，我们提出了一种可以降低镜面灵敏度的优化方法。首先，引入表面灵敏度来测量受迫偏转角下的表面精度。其次，结合动态链接库和MATLAB实现了表面灵敏度的外响应函数。最后，以两种情况的灵敏度权重之和为目标函数，以动态共振频率为约束条件，对拓扑结构进行优化。优化后的结构表明，x轴周围的表面灵敏度从2.58 nm / ± 1 ″降低到0.32 nm / ± 1 ″ ，y轴周围的表面灵敏度从3.75 nm / ± 1 ″降低到0.09 nm / ± 1 ”。