In this article, the simulation results, the technological steps of manufacturing, and the characterization results at low and medium frequencies (20 MHz to a few hundred MHz) of integrated inductors with two magnetic layers are presented. Simulation realized with the high-frequency structure simulator (HFSS) software allows the impact of the vertical and horizontal air gaps on the inductance value for inductors with two magnetic layers to be determined. Inductors with two magnetic layers are manufactured with magnetic thicknesses varying from 100 to $500~\mu \text{m}$ . The interest of this new manufacturing process is compatible with most ferrite. The measurement results show good agreement with the simulation results. By minimizing the vertical air gap, the inductance value increases with a ratio equal to the relative permeability of the magnetic material when field lines are totally canalized into the magnetic layers. The extracted resistance evolution of the inductor on the frequency is explained by taking into account the skin and proximity effects for the conductor losses and the iron losses for the magnetic material.

中文翻译：

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具有两个磁性层的集成电感器的设计、制造和表征

在本文中，介绍了具有两个磁性层的集成电感器的仿真结果、制造工艺步骤以及在中低频（20 MHz 至几百 MHz）下的表征结果。使用高频结构模拟器 (HFSS) 软件实现的模拟可以确定垂直和水平气隙对具有两个磁性层的电感器电感值的影响。制造具有两个磁性层的电感器，其磁性厚度从 100 到 $500~\mu \text{m}$ 不等。这种新制造工艺的优点是与大多数铁氧体兼容。测量结果与仿真结果吻合良好。通过最小化垂直气隙，当磁力线完全进入磁性层时，电感值以等于磁性材料的相对磁导率的比率增加。通过考虑导体损耗的趋肤效应和邻近效应以及磁性材料的铁损来解释电感器在频率上的提取电阻演变。