Microwave impedance microscope (MIM) is a near-field microwave technology which has low emission energy and can detect samples without any damages. It has numerous advantages, which can appreciably suppress the common-mode signal as the sensing probe separates from the excitation electrode, and it is an effective device to represent electrical properties with high spatial resolution. This article reviews the major theories of MIM in detail which involve basic principles and instrument configuration. Besides, this paper summarizes the improvement of MIM properties, and its cutting-edge applications in quantitative measurements of nanoscale permittivity and conductivity, capacitance variation, and electronic inhomogeneity. The relevant implementations in recent literature and prospects of MIM based on the current requirements are discussed. Limitations and advantages of MIM are also highlighted and surveyed to raise awareness for more research into the existing near-field microwave microscopy. This review on the ongoing progress and future perspectives of MIM technology aims to provide a reference for the electronic and microwave measurement community.

微波阻抗显微镜（MIM）是一种近场微波技术，具有较低的发射能量，可以检测样品而没有任何损坏。它具有许多优点，可以在感测探针与激励电极分离时显着抑制共模信号，并且它是一种以高空间分辨率表示电特性的有效设备。本文详细回顾了MIM的主要理论，其中涉及基本原理和仪器配置。此外，本文总结了MIM特性的改进及其在定量测量纳米介电常数和电导率，电容变化和电子不均匀性方面的前沿应用。讨论了基于当前需求的MIM的最新文献和展望中的相关实现。MIM的局限性和优势也得到了强调和调查，以提高人们对现有近场微波显微镜研究的认识。本文对MIM技术的不断发展和未来前景进行了综述，旨在为电子和微波测量领域提供参考。