A speckle-based method for the X-ray crystal diffraction wavefront measurement is implemented, and the slope errors of channel-cut crystals with different surface characteristics are measured. The method uses a speckle scanning technique generated by a scattering membrane translated using a piezo motor to infer the deflection of X-rays from the crystals. The method provides a high angular sensitivity of the channel-cut crystal slopes in both the tangential and sagittal directions. The experimental results show that the slope error of different cutting and etching processes ranges from 0.25 to 2.98 μrad. Furthermore, the results of wavefront deformation are brought into the beamline for simulation. This method opens up possibilities for new high-resolution applications for X-ray crystal diffraction wavefront measurement and provides feedback to crystal manufacturers to improve channel-cut fabrication.

中文翻译：

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使用散斑扫描技术的定性X射线通道切割晶体衍射波前测量

实施了基于斑点的X射线晶体衍射波前测量方法，并测量了具有不同表面特性的通道切割晶体的斜率误差。该方法使用散斑扫描技术，该技术是由散射膜产生的，该散射膜使用压电马达平移，以推断出晶体中X射线的偏转。该方法在切向和弧矢方向上都提供了通道切割的晶体斜率的高角度灵敏度。实验结果表明，不同切割和刻蚀工艺的斜率误差范围为0.25至2.98μrad。此外，将波前变形的结果带入束线以进行仿真。