Abstract Aluminum alloys are widely applied in optical turrets after coating and super-finishing. Gold films prepared on aluminum alloy substrates via electron beam (e-beam) evaporation are considered to be effective way to realize close to total reflection of incident light. Here, we investigated the optimization of the reflectivity parameters of e-beam evaporated gold films; then, the influence of different deposition parameters on the surface quality, adhesive force and reflectivity (incident light in the 650–1700 nm range) of the film at −20, 25 and 60°C were systematically studied. The results demonstrated that the reflectivity and adhesion of the gold films both increased after high temperature holding and decreased slightly after low temperature holding. However, the surface morphology of the gold film did not change substantially. After holding at 60 and −20°C, the adhesive force decreased, which indicated that the adhesion strength between the reflective membrane and the substrate decreased.

中文翻译：

---

60、-20、25℃处理的铝合金基体电子束蒸镀金膜反射率研究

摘要 铝合金在经过涂层和超精加工后被广泛应用于光学转台。通过电子束（e-beam）蒸发在铝合金基板上制备的金膜被认为是实现入射光接近全反射的有效方法。在这里，我们研究了电子束蒸镀金膜反射率参数的优化；然后，系统研究了不同沉积参数对 -20、25 和 60°C 下薄膜表面质量、粘附力和反射率（650-1700 nm 范围内的入射光）的影响。结果表明，金膜的反射率和附着力在高温保温后均有所增加，在低温保温后略有下降。然而，金膜的表面形貌并没有发生实质性的变化。