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Structural Change in Ag 2 Te Buffer Layer During Two-Step Closed Space Sublimation of AgGaTe 2
Journal of Electronic Materials ( IF 2.1 ) Pub Date : 2020-09-30 , DOI: 10.1007/s11664-020-08465-4
Y. Yu , M. Kobayashi

An AgGaTe2 layer was prepared using an Ag2Te buffer layer. Ag2Te layers were deposited by the radio-frequency sputtering method. We investigate the variations in the Ag2Te buffer layer surface morphology and composition that take place during annealing. Ag2Te films were annealed in a tube furnace. The composition and surface morphology of the Ag2Te layer were found to vary depending on the thermal annealing temperature and duration. It was confirmed that a dewetting process in the Ag2Te layer occurred with annealing between 200°C and 500°C, and O2 and Mo reacted at 600°C and then became MoO3 compounds. Mo and Te were completely desorbed from the surface at 700°C. This confirmed that the surface morphology of the Ag2Te layer was controlled by the annealing temperature and duration.



中文翻译:

AgGaTe 2两步闭空间升华过程中Ag 2 Te缓冲层的结构变化

使用Ag 2 Te缓冲层制备AgGaTe 2层。通过射频溅射法沉积Ag 2 Te层。我们调查了在退火过程中发生的Ag 2 Te缓冲层表面形态和组成的变化。Ag 2 Te薄膜在管式炉中退火。发现Ag 2 Te层的组成和表面形态根据热退火温度和持续时间而变化。确认了在200℃〜500℃之间的退火下,在Ag 2 Te层中发生了脱湿处理,并且O 2和Mo在600℃下反应而成为MoO 3。化合物。Mo和Te在700℃下从表面完全解吸。这证实了Ag 2 Te层的表面形态受到退火温度和持续时间的控制。

更新日期:2020-11-21
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