Abstract We proposed and demonstrated an optoelectronic oscillator (OEO) based temperature sensor with high sensitivity and precision. The sensor is realized using a silicon-on-insulator-based microring resonator (MRR) and a dual-loop structure. The MRR, which acts as a sensing probe, is optimized and designed to have an ultra-high Q factor and high sensitivity to temperature variations simultaneously. The dual-loop structure is used to further stabilize the oscillating frequency of OEO. By doing so, we achieved an on-chip temperature sensor with a sensing precision of ± 1 . 73 × 10−4 ∘ C. Meanwhile, the sensing resolution and sensitivity are 6.79 × 10−3 ∘ C and 10.02 GHz/ ∘ C, respectively. The impact of the size of the MRR on the temperature sensor is also investigated.

中文翻译：

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一种基于光电振荡器的高灵敏度高精度温度传感器

摘要 我们提出并演示了一种基于光电振荡器 (OEO) 的高灵敏度和高精度温度传感器。该传感器使用基于绝缘体上硅的微环谐振器 (MRR) 和双回路结构实现。作为传感探头的 MRR 经过优化和设计，同时具有超高 Q 因子和对温度变化的高灵敏度。双回路结构用于进一步稳定OEO的振荡频率。通过这样做，我们实现了感测精度为 ± 1 的片上温度传感器。73 × 10−4 ∘ C。同时，传感分辨率和灵敏度分别为 6.79 × 10−3 ∘ C 和 10.02 GHz/ ∘ C。还研究了 MRR 大小对温度传感器的影响。