Abstract Several authors have reported that partially or even totally replacing the conventional Ar sputtering gas with Ne in HiPIMS plasmas results in significant improvement of mechanical and tribological properties of the DLC coatings. In this work, the tribological properties of the produced DLC films with different substrate biasing and Ne contents in discharge gas were evaluated. The tribological properties of the DLC films were evaluated on a reciprocating sliding machine. All DLC films showed no sign of failure after the tribological tests. The higher wear resistance of DLC films produced in Ar-Ne discharges is reached with only a small increase of the coefficient of friction. The conjunction of the low friction coefficient (between 0.10 and 0.18) and specific wear rate (between 4x10-17 and 7x10-17 m3/Nm) obtained by the DLC films (either deposited with -80 V of biasing or with Ne) in this work, is possible to affirm that these films are good candidates to replace the CrN films used in many applications of the automotive industry.

中文翻译：

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DOMS 沉积的 DLC 涂层在混合 Ar-Ne 放电中的摩擦学性能

摘要 几位作者报告说，在 HiPIMS 等离子体中用 Ne 部分或什至完全取代传统的 Ar 溅射气体可显着改善 DLC 涂层的机械和摩擦学性能。在这项工作中，评估了具有不同衬底偏置和放电气体中 Ne 含量的 DLC 薄膜的摩擦学性能。DLC 薄膜的摩擦学性能在往复滑动机上进行评估。在摩擦学测试之后，所有 DLC 薄膜都没有显示出失败的迹象。在 Ar-Ne 放电中产生的 DLC 膜具有更高的耐磨性，只需稍微增加摩擦系数即可。低摩擦系数（介于 0.10 和 0.