This paper presents a multiparameter water quality sensor chip with temperature compensation. The sensor chip was manufactured using microelectromechanical system (MEMS) technology. The surface of the chip integrated pH, dissolved oxygen (DO), ammonia nitrogen, and temperature sensors. To compensate for the solution temperature, the chip was also designed with a sandwich, plate-type serpentine Pt resistance heater. The experimental results showed that the pH sensor had a high sensitivity of 0.288 mA/pH with good linearity (), the sensitivity of the temperature sensor was 0.949 Ω/°C, the sensitivity of the ammonia nitrogen sensor was 0.1139 mA/ppm, the sensitivity of the dissolved oxygen (DO) sensor was 2.22 μA/ppm, and the sensitivity of the temperature changes with respect to the heater power was 0.3126°C/mW. Compared with a single water quality parameter sensor, the as-prepared sensor chip could simultaneously detect multiple parameters of a water sample and had a good temperature compensation effect. Moreover, the sensor chip was small in size, rugged, and highly accurate.

中文翻译：

---

微型多参数水质传感器芯片及具有温度补偿功能的系统研究

本文提出了一种具有温度补偿功能的多参数水质传感器芯片。传感器芯片是使用微机电系统（MEMS）技术制造的。芯片表面集成了pH，溶解氧（DO），氨氮和温度传感器。为了补偿溶液温度，芯片还设计有夹层板式蛇形Pt电阻加热器。实验结果表明，pH传感器具有0.288 mA / pH的高灵敏度和良好的线性（），所述温度传感器的灵敏度为0.949  Ω /℃，氨氮传感器被0.1139毫安/ ppm，则溶解氧的灵敏度（DO）传感器为2.22的灵敏度 μ A / ppm，且的灵敏度相对于加热器功率的温度变化为0.3126℃/ mW。所制备的传感器芯片与单个水质参数传感器相比，可以同时检测水样的多个参数，具有良好的温度补偿效果。而且，该传感器芯片尺寸小，坚固且高度精确。