Coated nanoparticles have a wide range of potential applications due to their unique physical, chemical or biological properties. Fluidized bed atomic layer deposition (FB-ALD) is a promising method for scalable production of nanoparticles with a controlled ultrathin and conformal layer. At present, the coating efficiency has been largely limited by the unsatisfactory fluidization quality of nanoparticle agglomerates, including the low film uniformity, precursor utilization and the long overall coating time. This review gives an overview of the process optimization of FB-ALD technology, with an emphasis on the nanoparticle fluidization. Firstly, various FB-ALD reactors which can improve the dispersion of nanoparticle agglomerates are reviewed. In-situ monitoring methods have also been provided to characterize the fluidization and film growth behaviors in FB-ALD reactors. With special attention to the different length and time scales, multiscale simulations on fluidization and ALD process are discussed for the optimization of fluidization quality and coating efficiency. The applications of FB-ALD technology in various fields have been further presented. Finally, perspectives on the design of reactors, on-line monitoring methods, and modelling approaches are discussed. We conclude that with effective fluidization assisting methods, FB-ALD is a scalable method to provide ultrathin and uniform films on large quantities of nanoparticles.

涂覆的纳米颗粒由于其独特的物理，化学或生物学特性而具有广泛的潜在应用。流化床原子层沉积（FB-ALD）是一种具有可控的超薄和保形层的可扩展生产纳米颗粒的有前途的方法。目前，由于纳米颗粒附聚物的流化质量不令人满意，包括较低的膜均匀性，前体利用率和较长的总体涂覆时间，涂覆效率已受到很大的限制。这篇综述概述了FB-ALD技术的工艺优化，重点是纳米颗粒的流化。首先，综述了各种可改善纳米颗粒团聚体分散性的FB-ALD反应器。还提供了现场监测方法来表征FB-ALD反应器中的流化和膜生长行为。特别注意不同的长度和时间尺度，讨论了流化和ALD工艺的多尺度仿真，以优化流化质量和涂层效率。进一步介绍了FB-ALD技术在各个领域的应用。最后，讨论了反应堆设计，在线监测方法和建模方法的观点。我们得出结论，通过有效的流化辅助方法，FB-ALD是可扩展的方法，可在大量纳米颗粒上提供超薄且均匀的膜。讨论了流化和ALD工艺的多尺度仿真，以优化流化质量和涂层效率。进一步介绍了FB-ALD技术在各个领域的应用。最后，讨论了反应堆设计，在线监测方法和建模方法的观点。我们得出结论，通过有效的流化辅助方法，FB-ALD是可扩展的方法，可在大量纳米颗粒上提供超薄且均匀的膜。讨论了流化和ALD工艺的多尺度仿真，以优化流化质量和涂层效率。进一步介绍了FB-ALD技术在各个领域的应用。最后，讨论了反应堆设计，在线监测方法和建模方法的观点。我们得出结论，通过有效的流化辅助方法，FB-ALD是可扩展的方法，可在大量纳米颗粒上提供超薄且均匀的膜。