Abstract

We propose a method for improving accuracy of nanomechanical measurements by an atomic force microscope. We describe the contact interaction of the cantilever with the sample using an analytic model taking into account different mechanisms of the cantilever probe operation (it can be clamped or can slide over the sample surface), the geometrical and mechanical characteristics of the sample and the cantilever, and their mutual arrangement. For the case of sliding, a filter is developed for correcting signals of contact stiffness and deformation measured on a sample with a developed relief. The application of the filter is illustrated by images obtained with an atomic force microscope in the visualization regime based on point-by-point recording of the forced quasi-static interaction of the cantilever probe with the sample.

中文翻译：

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原子力显微镜的接触刚度测量

摘要

我们提出了一种通过原子力显微镜提高纳米机械测量精度的方法。我们使用分析模型描述了悬臂与样品的接触相互作用，其中考虑了悬臂探针操作的不同机制（可以被夹紧或可以在样品表面上滑动），样品和悬臂的几何和机械特性，以及彼此之间的安排。对于滑动的情况，开发了一种滤波器，用于校正在具有显着浮雕的样品上测得的接触刚度和变形信号。过滤器的应用以原子力显微镜在可视化状态下基于悬臂探针与样品的强制准静态相互作用的逐点记录记录的图像说明。