Abstract In this study, we propose an inductive angular position sensor comprising thin film, gold spiral inductors on ceramic chips as an alternative to the current state of the art which suffers from limitations in terms of the scope for micro-miniaturization. The geometry of the transmitter and receiver coils, operating frequency, and the air gap between the transmitter and sense coils all influence the performance of the sensor. Herein, we design and fabricate an inductive position sensor based on micro inductors normally employed in the resonant elements of microwave circuits and as chokes in power sources. We use these inductors as both a magnetic field receiver and transmitter and quantify the generated electromagnetic field. This approach has the advantage of providing angular sensing while being substantially easier and more economical to fabricate compared to currently available commercial sensors. The sensor is designed in such a way that the inductance versus angular displacement possesses an arctangent relationship. Due to this feature, the angular position is obtained easily from the sensor signal without the need for complex mathematical calculations, which is not the case for most of the planar coil-based sensors. A prototype of the proposed sensor has been developed and tested. The sensor has an accuracy comparable with much larger existing sensors (residual error standard deviation 2.55% of full scale), a high linearity (R2 99.3%) and a low sensitivity to injected noise (0.5%). This low-cost, miniature, rotary position sensor could find numerous applications especially in the modern field of automotive engineering.

中文翻译：

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使用低成本制造技术研究微型电感式角位置传感器的可行性

摘要 在这项研究中，我们提出了一种电感式角位置传感器，该传感器包括陶瓷芯片上的薄膜金螺旋电感器，作为目前在微型化范围方面受到限制的现有技术的替代方案。发射器和接收器线圈的几何形状、工作频率以及发射器和感测线圈之间的气隙都会影响传感器的性能。在此，我们设计并制造了一种基于微型电感器的电感式位置传感器，该电感器通常用于微波电路的谐振元件和电源中的扼流圈。我们将这些电感器用作磁场接收器和发射器，并对产生的电磁场进行量化。这种方法具有提供角度感测的优势，同时与当前可用的商业传感器相比，制造起来更容易且更经济。传感器的设计方式使得电感与角位移具有反正切关系。由于这一特性，无需复杂的数学计算即可从传感器信号中轻松获得角位置，而大多数基于平面线圈的传感器并非如此。所提出的传感器的原型已经开发和测试。该传感器的精度可与更大的现有传感器相媲美（残余误差标准偏差为满量程的 2.55%）、高线性度 (R2 99.3%) 和对注入噪声的低灵敏度 (0.5%)。这种低成本、微型、