During the operation of tapping mode atomic force microscope (TM-AFM), the gap between the cantilever and sample surface is very small (several nanometers to micrometers). Owing to the small gap distance and high vibration frequency, squeeze film force should be considered in TM-AFM. To explore the mechanism of squeeze film damping in TM-AFM, three theoretical microcantilever simplified models are discussed innovatively herein: tip probe, ball probe, and tipless probe. Experiments and simulations are performed to validate the theoretical models. It is of great significance to improve the image quality of atomic force microscope.

中文翻译：

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轻敲模式原子力显微镜下不同微悬臂梁探头的挤压膜阻尼效应

在轻敲模式原子力显微镜（TM-AFM）的操作过程中，悬臂与样品表面之间的间隙非常小（几纳米到几微米）。由于间隙距离小和振动频率高，TM-AFM 中应考虑挤压薄膜力。为了探索TM-AFM中挤压膜阻尼的机理，本文创新性地讨论了三种理论微悬臂梁简化模型：尖端探针、球探针和无尖端探针。进行实验和模拟以验证理论模型。对提高原子力显微镜的图像质量具有重要意义。